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Šeö’…Þ—¿iŒõŠw”––ŒÞ—¿j‚Ì“Á«PVD characteristic table

Šeö’…Þ—¿iŒõŠw”––ŒÞ—¿j‚Ì“Á«

Ž_‰»•¨

 •i–¼  ‹üÜ—¦
(550nm‹ß•Ó)
ö”­•û–@  —˜_–§“x(g/cm3)  Žg—p”g’·ˆæ  ö”­‰·“x(Ž)  —Z“_(Ž)
Al2O3  1.63  EB  4.0  0.2`7ƒÊm 2,050 2,015
CeO2 2.0 EB 7.3 0.4`16ƒÊm 2,000 1,950
Cr2O3 \ EB
’ïR‰Á”M
5.21 \ 2,000 1,990 
HfO2 1.95  EB 9.68 0.22`12ƒÊm \ 2,812
La2O3 1.9 EB
’ïR‰Á”M
6.51 0.3ƒÊm` 1,500 2,000
MgO 1.74 EB 3.65 0.2`8ƒÊm 2,800 2,800
Nb2O3 2.3 EB 4.47 0.32`8ƒÊm \ 1,520
NiO \ EB 6.96 \ \ 1,998
SiO2 1.46 EB 2.20 0.2`8ƒÊm 2,000 1,600
Ta2O5 2.1 EB 8.73 0.4`10ƒÊm 2,100 1,469
TiO2 2.3`2.55 EB 4.26 0.4`3ƒÊm 2,000 1,640
Ti3O5 2.3`2.55 EB 4.26 0.4`3ƒÊm 2,000 1,640
Y2O3 1.87 EB 4.84 0.3`12ƒÊm 2,400 2,410
WO3 \ \ 7.15 \ \ 1,473
ZnO 2.1 ’ïR‰Á”M 5.47 0.4ƒÊm` 1,100 1,800
ZrO2 2.05 EB 5.56 0.34`12ƒÊm 2,700 2,677
ZrO2+TiO2 2.1 EB 4.0 0.4`7ƒÊm \ 2,400

ƒtƒb‰»•¨

•i–¼ ‹üÜ—¦
(550nm‹ß•Ó)
ö”­•û–@ —˜_–§“x
(g/cm3)
Žg—p”g’·ˆæ ö”­‰·“x(Ž) —Z“_(Ž)
AlF3 1.38 ’ïR‰Á”M 2.88 0.2ƒÊm` \ 1,294
CaF2 1.23`1.45 ’ïR‰Á”M 3.18 0.15`12ƒÊm 1,280 1,360
CeF3 1.63 ’ïR‰Á”M  5.8 0.3`5ƒÊ‚ 1,360 1,324
GdF3 1.59 ’ïR‰Á”M \ 0.3ƒÊ‚` \ 1,230
LaF3 1.59 ’ïR‰Á”M 5.9 0.22`14ƒÊm 1,350 1,490
LiF 1.3 ’ïR‰Á”M 2.64 0.11`7ƒÊm 840 842
MgF2 1.38`1.4 ’ïR‰Á”M 3.2 0.11`4ƒÊm 1,270 1,260
NaF 1.29`1.3 ’ïR‰Á”M 2.79 0.2ƒÊm` 998 998
NdF3 1.61 ’ïR‰Á”M 6.5 0.25ƒÊm` 1,410 1,410
YF3 1.5 EB
’ïR‰Á”M
5.07 0.2`14ƒÊm 1,100 1,152

—°‰»•¨

•i–¼ ‹üÜ—¦
(550nm‹ß•Ó)
ö”­•û–@ —˜_–§“x
(g/cm3)
Žg—p”g’·ˆæ ö”­‰·“x(Ž) —Z“_(Ž)
ZnS 2.3`2.4 EB
’ïR‰Á”M
4.1 0.4`14ƒÊm 1,100 1,020


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ƒ„ƒ}ƒiƒJƒqƒ…[ƒeƒbƒNŠ”Ž®‰ïŽÐ

§606-0804
‹ž“sŽs¶‹ž‹æ‰ºŠ›¼Œ´’¬29”Ô’n

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